MTM-20 High Resolution Thickness Controller System* 220VAC, 50/60Hz
高分辨率厚度监测器和厚度控制器基于石英晶体的振荡频率随质量而变化的原理沉积膜在其上表面。以电子方式测量这种效果允许用于确定沉积膜的厚度。一旦密度蒸发的材料进入系统，将厚度测量到一定分辨率在范围为 0-0.1 纳米的四位 LED 显示屏上为 099.9nm。晶体和支架安装在真空室中，并通过提供的连接到 FTM 电源真空馈通。
MTM-20 高分辨率测厚仪专为 Cressington溅射镀膜机系统设计，与 108Auto、108Auto/SE 和 208HR 溅射镀膜机完全兼容系统。
MTM-10 High Resolution Thickness Monitor and
MTM-20 High Resolution Thickness Controller Specifications
General Specifications:
Microprocessor based, 4-digit display, push-button zero
6MHz crystal with lifetime check
5 times per second update rate
Thickness Range:
0.0 - 999.9nm (pos/neg)
Resolution:
0.1nm for gold or carbon
Density Range:
0.50 - 30.00g/cm³
Tooling Factor Range:
0.25 - 8.0
Vacuum Feedthrough:
CS-108; Diameter 10mm up to a plate/flange thickness of 9mm.
Crystal Holder:
Stainless Steel ø19 x 20mm. M4 threaded hole for mounting, 1/2" size crystals
Crystal Holder Cable:
Mini-SMB, female/female between crystal holder and CS-108 vacuum feedthrough
Processor Function:
Four sets of values can be stored in memory under Density and four under Tooling for both the MTM-10 and MTM20
MTM-20 Controller:
MTM-20 only: Programmable thickness termination function with termination interface cable on 108 auto, 208HR and DC-100
Termination facility range 0-999.9nm
MTM-10/20 Box Size, WxDxH
210 x 160 x 77mm (8.27" x 6.3" x 3.03")
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