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SEMI E177 LCs featuring 5 posts and 3 fiducial marks |
SEMI E177 LCs featuring 8 posts and 3 fiducial marks |
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With the increase in interest in automation of sample preparation for failure analysis in the semiconductor industry, the SEMI industry association has recently published the E177 standard for automated transmission electron microscopy (TEM). The products here are designed to fulfill the requirements for consumables in the automated TEM workflow. |
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