Scanning electron microscope (SEM and Focused Ion Beam (FIB) system resolution is defined in terms of a combination of criteria: resolution and number of gray levels in the image. This is to ensure that the resolution has not been distorted by using too much contrast to maximize visibility of the edges. High resolution images ideally show fine details together with a low noise and a good range of contrast levels. The widely used gold on carbon test specimens are excellent for SEM, FESEM and FIB resolution testing. The gold particles, with superior feature details, generate high secondary and/or backscatter electron signals with excellent contrast against the carbon background. Five different special resolution testing specimens are available with different gold particle sizes for different resolution levels. Available unmounted or conveniently mounted on most common SEMs stubs.

Store your calibration and test specimens in a vacuum desiccator such as the #16179 PELCO® SEM Sample Stub Vacuum Desiccator.