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Outside Dimensions
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Product Number
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Wafer Size
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Outside Dimensions
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1395-10, 1397-10B
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ø33 x 10mm
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1395-15
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ø48 x 10mm
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1395-20, 1397-20B
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ø60 x 11mm
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1395-25, 1397-25B
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ø75 x 11mm
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1395-30, 1397-30B
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ø84 x 11mm
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1395-40, 1397-40B
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ø110 x 11mm
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1395-50
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ø138 x 18mm
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1395-60, 1397-60B
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ø160 x 18mm
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Wafer Carrier components include:
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Base
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Lid
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Spider ring (pressure retention, edges or center)
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